Chemical Mechanical Polishing (CMP) Alumina Ceramic Plate (Al2O3 99.7%)
Al2O3: 99.7~99.9%
Application:
Chemshun Ceramics large size high purity alumina baseboard, alumina substrate have widely usage. It normal used as the baseboard /support receptors/carrier Plate Used in LCD Manufacturing Equipment, Lithography Equipment.
Features :
High rigidity (Hardness, Mechanical Strength, Wear Resistance)
High chemical durability
AIO Large Size
Shape & Size:
Shape as Long board, long bar, square board, thin board size below 1500*600mm , such as : 1200x500x20, 1400x900x30, 500x500x45mm etc.
Customized products with various size are accepted.
Main Parameter : (Chemical / physical):
|
|
Unit |
Chemshun 99.7 Alumina Ceramics |
General Properties |
Al2O3 content |
wt% |
99.7-99.9 |
Density |
gm/cc |
3.94-3.97 |
Color |
- |
Ivory |
Water absorption |
% |
0 |
Mechanical Properties |
Flexural Strength(MOR) 20 ºC |
Mpa(psix10^3) |
440-550 |
Elastic Modulus 20ºC |
GPa (psix10^6) |
375 |
Vickers Hardness |
Gpa(kg/mm2) R45N |
>=17 |
Bending Strength |
Gpa |
390 |
Tensile Strength 25ºC |
MPa(psix10^3) |
248 |
Fracture Toughness (K I c) |
Mpa* m^1/2 |
4-5 |
Thermal Properities |
Thermal conductivity(20ºC) |
W/mk |
30 |
Coefficient of Thermal expansion(25-1000ºC) |
1x 10^-6/ºC |
7.6 |
Thermal Shock Resistance |
ºC |
200 |
Maximum use temperature |
ºC |
1700 |
Electrical Properities |
Dielectric Strength (1MHz) |
ac-kv/mm(ac v/mil) |
8.7 |
Dielectric Constant(1 MHz) |
25ºC |
9.7 |
Volume Resistivity |
ohm-cm (25ºC) |
>10^14 |
ohm-cm (500ºC) |
2x10^12 |
ohm-cm (1000ºC) |
2x10^7 |
Service:
We accept custom orders.
If you want to know more product information, please feel free contact us and we'll afford you the most suitable product and best service!