High Purity Alumina Ceramics Aumina Disc for Wafer Polishing
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Product Details
| Customization: | Available |
|---|---|
| Al2O3: | 99.7~99.9% |
| Application: | Semiconductors |
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Basic Info.
- Model NO.
- Chemshun Ceramic
- Transport Package
- Carton + Wooden Box
- Specification
- Within D850mm, thickness 45mm.
- Trademark
- Chemshun Ceramics
- Origin
- China
- HS Code
- 6909191200
- Production Capacity
- 500pic /Month
Product Description
High Purity Alumina Ceramics Aumina Disc for Wafer Polishing
Description:
Chemshun Ceramics' alumina ceramics sapphire lapping wafer polishing is shaped as PIBM producing process. Its an internaltional advanced technology. PIBM sucessful solve the key problem of crack and deformation of large size alumina ceramics.PIBM technology will open another window of fine ceramics. We not only produce the high quality alumina ceramic wafer polishing plate, but also other series of large size high purity alumina ceramics such as 1200x500x20mm ceramic substrates for LCD manufacturing equipment, semiconductor delviery tracks, vacuum parts, general mechanical parts, bulletproof ceramics.
Application:
Pingxiang Chemshun Ceramics' High Purity 99.7% Alumina Ceramic Sapphire Lapping wafer Polishing Turn Table as an important component of CMP chemical mechanical polishing process. CMP is the necessary for producing process of the sapphire and Wafer. Because of the high purity alumina ceramics polishing plate excellent working performance, it is replacing the Metal wafer polishing plate.
Features :
High rigidity (Hardness, Mechanical Strength, Wear Resistance)
High chemical durability
Surface shape & roughness control
Pretty Price
Size:
Disc, ring size below ∅850mm, thickness 45mm.
For example: D150mm, D360mm, D450MM D600mm.
Customized products with various size are accepted.
Main Parameter : (Chemical / physical):
Chemshun Ceramics High Purity 99.7% Alumina Ceramic Sapphire Polishing Turn Table widely used in the semiconductors manufacturing equipment. For more information, welcome to direclty contact with us.
Description:
Chemshun Ceramics' alumina ceramics sapphire lapping wafer polishing is shaped as PIBM producing process. Its an internaltional advanced technology. PIBM sucessful solve the key problem of crack and deformation of large size alumina ceramics.PIBM technology will open another window of fine ceramics. We not only produce the high quality alumina ceramic wafer polishing plate, but also other series of large size high purity alumina ceramics such as 1200x500x20mm ceramic substrates for LCD manufacturing equipment, semiconductor delviery tracks, vacuum parts, general mechanical parts, bulletproof ceramics.
Application:
Pingxiang Chemshun Ceramics' High Purity 99.7% Alumina Ceramic Sapphire Lapping wafer Polishing Turn Table as an important component of CMP chemical mechanical polishing process. CMP is the necessary for producing process of the sapphire and Wafer. Because of the high purity alumina ceramics polishing plate excellent working performance, it is replacing the Metal wafer polishing plate.
Features :
High rigidity (Hardness, Mechanical Strength, Wear Resistance)
High chemical durability
Surface shape & roughness control
Pretty Price
Size:
Disc, ring size below ∅850mm, thickness 45mm.
For example: D150mm, D360mm, D450MM D600mm.
Customized products with various size are accepted.
Main Parameter : (Chemical / physical):
| Unit | Chemshun 99.7 Alumina Ceramics | ||
| General Properties | Al2O3 content | wt% | 99.7-99.9 |
| Density | gm/cc | 3.94-3.97 | |
| Color | - | Ivory | |
| Water absorption | % | 0 | |
| Mechanical Properties | Flexural Strength(MOR) 20 ºC | Mpa(psix10^3) | 440-550 |
| Elastic Modulus 20ºC | GPa (psix10^6) | 375 | |
| Vickers Hardness | Gpa(kg/mm2) R45N | >=17 | |
| Bending Strength | Gpa | 390 | |
| Tensile Strength 25ºC | MPa(psix10^3) | 248 | |
| Fracture Toughness (K I c) | Mpa* m^1/2 | 4-5 | |
| Thermal Properities | Thermal conductivity(20ºC) | W/mk | 30 |
| Coefficient of Thermal expansion(25-1000ºC) | 1x 10^-6/ºC | 7.6 | |
| Thermal Shock Resistance | ºC | 200 | |
| Maximum use temperature | ºC | 1700 | |
| Electrical Properities | Dielectric Strength (1MHz) | ac-kv/mm(ac v/mil) | 8.7 |
| Dielectric Constant(1 MHz) | 25ºC | 9.7 | |
| Volume Resistivity | ohm-cm (25ºC) | >10^14 | |
| ohm-cm (500ºC) | 2x10^12 | ||
| ohm-cm (1000ºC) | 2x10^7 |
Chemshun Ceramics High Purity 99.7% Alumina Ceramic Sapphire Polishing Turn Table widely used in the semiconductors manufacturing equipment. For more information, welcome to direclty contact with us.
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